Cut and paste this URL to share the unmodified register and value:
https://regviz.com/r/Silicon Labs/Series1/ZGM13/ZGM130S037HGN/LESENSE/CH5_TIMING#0x0
Scan Configuration
Set Excitation Time
Set Sample Delay
Set Measure Delay
https://github.com/cmsis-svd/cmsis-svd-data